This EPTCS volume contains the proceedings for the Fifth International Workshop on Formal Methods for Autonomous Systems (FMAS 2023), which was held on the 15th and 16th of November 2023. FMAS 2023 was co-located with 18th International Conference on integrated Formal Methods (iFM) (iFM'22), organised by Leiden Institute of Advanced Computer Science of Leiden University. The workshop itself was held at Scheltema Leiden, a renovated 19th Century blanket factory alongside the canal. FMAS 2023 received 25 submissions. We received 11 regular papers, 3 experience reports, 6 research previews, and 5 vision papers. The researchers who submitted papers to FMAS 2023 were from institutions in: Australia, Canada, Colombia, France, Germany, Ireland, Italy, the Netherlands, Sweden, the United Kingdom, and the United States of America. Increasing our number of submissions for the third year in a row is an encouraging sign that FMAS has established itself as a reputable publication venue for research on the formal modelling and verification of autonomous systems. After each paper was reviewed by three members of our Programme Committee we accepted a total of 15 papers: 8 long papers and 7 short papers.

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